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Teledyne Hastings Dual Sensor Vacuum Gauge, 10 mTorr to 1 kTorr, HPM-2002S-02
This product has been discontinued by the manufacturer.
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Description
The Model 2002 Dual Sensor Vacuum Gauge is a wide range vacuum instrument consisting of a digital microprocessor-based display unit, two sensing elements (microPirani and piezoresistive bridge) in a single tube shell, and an interconnecting cable. Together, these components provide accurate vacuum measurement over 7 decades of pressure from 1x10-4 Torr to 1000 Torr. This instrument is a new design approach based on over 60 years of experience by Teledyne Hastings Instruments (THI) with well-known pressure measurement techniques. A single tube contains both a THI patented thin film Pirani sensor and a piezoresistive sensor in a small, rugged and inexpensive package. The piezoresistive bridge is a direct force sensor which gives very accurate readings at high pressures from atmosphere down to less than 1 Torr without the concerns of gas composition. The thin film Pirani measures pressures from a few Torr down to 1x10-4 Torr. An algorithm residing in the microprocessor ensures a seamless transition between sensors. Additionally, the two sensor outputs are used in a cross calibration mode to give even higher accuracy.
Features:
Features:
- Combined Pirani and Piezoresistive Sensors in a Single Tube
- Wide Dynamic Range: 1000 Torr to 1x10-4 Torr
- Automatic Crossover Calibration
- Attitude Insensitive - Can Be Mounted in Any Orientation
- Fast Dynamic Response Time
- Compact Rugged Design
- Burst Pressure 150 PSIG
- Linear Per Decade Output Signal
- Custom Outputs Available
- Wide Range Vacuum Applications
- Process Control and Test
- Ultra-Fast Response
- General Vacuum Control
- Vacuum Furnace Control
- Loadlock System
- Transformer "DeGAS" System
- Sputtering Chambers
Product Specifications
General Specifications
| Measuring Range: | 1x10-4 Torr to 10+3 Torr |
|---|---|
| Ambient Temperature Operating Range & Compensation: | 0°C to 50°C |
| Accuracy (Based on N2 @ 23°C): | ±1.5% of reading (1000 Torr to 50 Torr) ±20% of reading (50 Torr to 1x10-3 Torr) |
| Output (Standard): | 1.0 - 4.5 Volts (0.5 VDC Linear per decade) |
| Process Control: | 2 TTL Outputs 1 TTL Remote Zero Input |
| Digital Readout: | Three green LED (0.6") - Resolution is a three digit floating point mantissa (plus exponent) |
| Input Voltage: | 90-260 VAC, 50 to 60 Hz, IEC receptacle A 6 ft. 3 wire ground power cord is provided with each unit |
| Stability with Voltage Variation: | Undetectable change in reading as power fluctuates |
| Response Time (Sensor/controller): | Step change from 10-3 Torr to 760 Torr (200 milliseconds) |
| Model 2002 Dimensions (Reference only): | 3.75"W x 3.75"H x 6.60"D (95mm x 95mm x 168mm) Standard DIN 43700 insert (1/4" DIN) Case constructed of NORYL - Rated UL-94 V1 (Self-extinguishing plastic) |
| Panel Thickness: | Adjustable to 3/16 inches. Unit mounts into 3.62 in. (92 mm) square hole |
| Sensor Mounting: | Any position without recalibrating |
| Sensor Internal Volume: | < 1.5 cc |
| Wetted Material: | Silicon Nitride, Silicon, Gold, Pyrex, 316 Stainless Steel, UHV Epoxy |
| Calibrated for Nitrogen: | Factory calibrated for nitrogen. Conversion factors for many other gases are selectable (consult instruction manual) |
| Burst Pressure (tube): | 150 PSIG |
| Proof Pressure: | 30 PSIG |
| Connections: | 1/4" VCRTM |