Description Specifications Literature Description The Model 2002 Dual Sensor Vacuum Gauge is a wide range vacuum instrument consisting of a digital microprocessor-based display unit, two sensing elements (microPirani and piezoresistive bridge) in a single tube shell, and an interconnecting cable. Together, these components provide accurate vacuum measurement over 7 decades of pressure from 1x10-4 Torr to 1000 Torr. This instrument is a new design approach based on over 60 years of experience by Teledyne Hastings Instruments (THI) with well-known pressure measurement techniques. A single tube contains both a THI patented thin film Pirani sensor and a piezoresistive sensor in a small, rugged and inexpensive package. The piezoresistive bridge is a direct force sensor which gives very accurate readings at high pressures from atmosphere down to less than 1 Torr without the concerns of gas composition. The thin film Pirani measures pressures from a few Torr down to 1x10-4 Torr. An algorithm residing in the microprocessor ensures a seamless transition between sensors. Additionally, the two sensor outputs are used in a cross calibration mode to give even higher accuracy. Features:Combined Pirani and Piezoresistive Sensors in a Single TubeWide Dynamic Range: 1000 Torr to 1x10-4 TorrAutomatic Crossover CalibrationAttitude Insensitive - Can Be Mounted in Any OrientationFast Dynamic Response TimeCompact Rugged DesignBurst Pressure 150 PSIGLinear Per Decade Output SignalCustom Outputs AvailableApplications:Wide Range Vacuum ApplicationsProcess Control and TestUltra-Fast ResponseGeneral Vacuum ControlVacuum Furnace ControlLoadlock SystemTransformer "DeGAS" SystemSputtering Chambers State of California Proposition 65 WARNINGCancer and Reproductive Harm - www.P65Warnings.ca.gov. Product Specifications General SpecificationsMeasuring Range:1x10-4 Torr to 10+3 TorrAmbient Temperature Operating Range & Compensation:0°C to 50°C Accuracy(Based on N2 @ 23°C):±1.5% of reading (1000 Torr to 50 Torr)±20% of reading (50 Torr to 1x10-3 Torr)Output (Standard):1.0 - 4.5 Volts (0.5 VDC Linear per decade)Process Control:2 TTL Outputs1 TTL Remote Zero InputDigital Readout:Three green LED (0.6") - Resolution is a three digit floating point mantissa (plus exponent)Input Voltage:90-260 VAC, 50 to 60 Hz, IEC receptacleA 6 ft. 3 wire ground power cord is provided with each unitStability with Voltage Variation:Undetectable change in reading as power fluctuatesResponse Time(Sensor/controller):Step change from 10-3 Torr to 760 Torr (200 milliseconds)Model 2002 Dimensions(Reference only):3.75"W x 3.75"H x 6.60"D (95mm x 95mm x 168mm)Standard DIN 43700 insert (1/4" DIN)Case constructed of NORYL - Rated UL-94 V1(Self-extinguishing plastic)Panel Thickness:Adjustable to 3/16 inches. Unit mounts into 3.62 in. (92 mm) square holeSensor Mounting:Any position without recalibratingSensor Internal Volume:< 1.5 ccWetted Material:Silicon Nitride, Silicon, Gold, Pyrex, 316 Stainless Steel, UHV EpoxyCalibrated for Nitrogen:Factory calibrated for nitrogen. Conversion factors for many other gases are selectable (consult instruction manual)Burst Pressure (tube):150 PSIGProof Pressure:30 PSIGConnections:KF-16TM Literature & Docs Product Specifications Product Specifications Accessories